Characterization and metrology for ULSI technology - 1998 international conference : Gaithersburg, Maryland, March 1998
- Författare
- International Conference on Characterization and Metrology for ULSI Technology ( : 1998 Gaithersburg) David G. Seiler
- (Editors, David G. Seiler .., Accompanying computer disc contains full text from the book, The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref, Includes bibliographical references and indexes)
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| American Institute of Physics | 1998 | USA, Woodbury New York | xv, 960 sidor. ill. |